Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy is used to determine the atoms present at a surface, their concentrations, their chemistry, and their lateral and depth distributions. This 2 day course offers each student to: Learn the principles of Auger electron spectroscopy (AES); Learn about optimizing the analysis of surfaces with Auger electron spectroscopy; Learn approaches for qualitative and quantitative analysis; Learn the types of problems that can be solved with AES; Know the latest developments in instrumentation.

This and and all other courses are available for On Site Training

WHAT THE COURSE COVERS:
  • Introduction
  • Terminology, Surfaces, Types of Surfaces
  • The principles of AES
  • Production of Auger electrons, peak labeling, ionization cross-sections, handbooks, books, backscattering, surface sensitivity, information depth, sample handling.
  • Qualitative Analysis
  • Direct and derivative spectra, identification of elements, energy resolution, peak widths, chemical effects, plasmons, cross transitions, ion-excited Auger transitions.
  • Quantitative Analysis
  • Auger Intensities, sensitivity factors, detection limit, lineshapes, analyzer transmission, electron multiplier effects, matrix factors, average matrix sensitivity factors, backscattering, angle of incidence and emission, standard spectra, diffraction.
  • Artifacts
  • Ionization loss peaks, electron beam damage.
  • Instrumentation
  • Field emission electron source, spatial resolution (beam), signal-to-noise, beam damage, cylindrical mirror analyzer (CMA), hemispherical type analyzer (HSA), modes of operation, electron detection, pulse counting, other electron sources, vacuum system, samples, other types of analyzers, scattering in analyzers, energy scale calibration.
  • Imaging and Spatial Resolution
  • Scanning electron microscopy, acceptance area, locating regions of interest, corrections for topography and backscattering, beam energy, spatial resolution (analysis), comparison of analyzers, Electron Energy Loss (EELS) imaging, ratioed scatter diagrams, line scans, image registration.
  • Data Acquisition, Processing and Depth Profiling
  • Spectrum subtraction, sputtering, crater edge profiling, angle resolved AES, factor analysis, linear least squares fitting, sample rotation, mechanical methods.
  • Insulating Samples
  • Charge control methods, effects on images and spectra, use of low energy ion beam.
  • Applications
  • Nano-analysis of spheres, particles, via holes, insulators, sputter depth profiles of nanolayers
  • Instrument selection and summary
  • Factors to consider, general summary.


WHO SHOULD ATTEND?
  • Scientists, technicians, and students who would like a detailed understanding of the use of Auger electron spectroscopy (AES) for surface analysis
  • Engineers
  • Technicians
  • Students who would like a detailed understanding of the use of Auger electron spectroscopy (AES) for surface analysis

INSTRUCTOR:

Dr. John Grant has extensive experience in the field of surface science, having worked in this area for over 35 years. He is an expert with the techniques used in such studies and has extensive experience in Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS or ESCA), ion bombardment of solids, sputter depth profiling, ion scattering spectroscopy (ISS), secondary ion mass spectroscopy (SIMS), scanning electron microscopy (SEM), low energy electron diffraction (LEED), ionization loss spectroscopy, soft x-ray appearance potential spectroscopy (APS), surface conductivity, surface photovoltaic effects, gas adsorption and desorption, electron beam interactions with solid surfaces, surface cleaning procedures, ultrahigh vacuum techniques, specimen preparation techniques, and controlled cleavage or fracture of specimens. He has worked with polymers, metals, semiconductors, and insulators. Dr. Grant has worked in this field in Australia, Europe, and the United States and is an internationally-recognized authority in the field of surface science. He is currently conducting research on optical coatings and nanomaterials.


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