Fundamentals of Chemical Vapor Deposition

This course is designed to provide a sound foundation in the fundamentals of chemical vapor deposition (CVD) used today in integrated circuit fabrication. Topics include chemical reactions and bonding, fundamentals of chemical vapor deposition, ALD Systems, CVD dielectric films applications, CVD conducting films applications, basic CVD system architecture, APCVD systems, LPCVD systems, PECVD systems and CVD safety issues.

Next Available Course Dates:

October 10, 2008 ~ Dallas, TX

Register now for the next session!

We offer this and all courses as On Site Training


WHAT THE COURSE COVERS:

  • Introduction to chemical reactions and bonding
  • Fundamentals of Chemical Vapor Deposition
  • Essential CVD principles, concepts & terminology
  • CVD dielectric films: properties and application
  • CVD conducting films: properties and application
  • ALD Systems
  • Basic chemical vapor deposition system architecture
  • APCVD Deposition Technology & typical systems
  • LPCVD Deposition Technology & typical systems
  • PECVD Deposition Technology & typical systems
  • CVD Safety Issues

WHO SHOULD ATTEND?

  • Tool and Material Vendors
  • R&M Technicians
  • Process Technicians
  • Equipment Engineers
  • Process Operators
  • Engineering
  • Other professionals who would like an explanation of Chemical Vapor Deposition

This course was written in Plain English. Materials included in this class include a Chemical Vapor Deposition manual with several color illustrations, and a Periodic Table.

INSTRUCTOR:

Dr. John Karonika is a senior staff instructor at PTI Seminars.  He has over twelve years experience teaching various technical and semiconductor courses at the University of Houston, Texas A&M University System, and PTI Seminars. He has designed, developed, implemented, and evaluated customized training courses for major U.S. semiconductor corporations. His Ph.D. dissertation was "The Role of Distance Education in Corporate Training in the United States Semiconductor Manufacturing Industry”. Dr Karonika is a well-respected industry instructor and has taught hundreds of short courses on Ion Implantation, CVD, Process Overview, and Metallization to engineers and operators worldwide at companies such as Intel, Motorola, Applied Materials, Texas Instruments, and numerous others.


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