Fundamentals of Thermal Processes
in Semiconductor Manufacturing

This course is designed to provide a sound foundation in the fundamentals of thermal processes employed today in integrated circuit fabrication. Topics include thermal processing concepts, oxidation applications and issues, diffusion applications and issues, annealing, rapid thermal processing, thermal contamination issues, and basic thermal system architecture.

We offer this and all courses as On Site Training


WHAT THE COURSE COVERS:
  • Terminology used in thermal processes
  • Essential thermal processing issues and fabrication concepts
  • Process limitations of diffusion and various tools used for thermal process.
  • Oxidation applications and issues
  • Diffusion applications and issues
  • Annealing
  • Rapid thermal processing - RTP
  • Thermal Contamination issues
  • Basic thermal process system architecture

WHO SHOULD ATTEND?
  • Tool and Material Vendors in Marketing and Sales
  • Process Operators
  • Process Engineers
  • Equipment Engineers
  • R & M Technicians
  • Process Technicians
  • Human Resources
  • Production
  • Equipment Marketing & Sales Personnel
  • Customer Service
  • Quality
  • Engineering
  • Other personnel who would like an explanation of thermal processes.

Each student will take home a Thermal Processes manual filled with color illustrations.


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