Fundamentals of Thermal Processes
in Semiconductor Manufacturing

WHAT THE COURSE COVERS:

• Terminology used in thermal processes
  
• Essential thermal processing concepts
• Oxidation applications and issues
• Diffusion applications and issues

• Annealing and other applications
• Rapid Thermal Processing - RTP
• Contamination issues in thermal processing
• Basic thermal process system architecture

WHO SHOULD ATTEND?

• Tool and Material Vendors
• Process Operators
• Equipment Engineers
• R & M Technicians
• Process Technicians
• Human Resources
• Production

• Equipment Marketing & Sales Personnel
• Customer Service
• Quality
• Engineering
• Other personnel who would like an explanation of thermal processes.

INSTRUCTOR:

Dr. John Karonika is a senior staff instructor at PTI Seminars. He has over twelve years experience teaching various technical and semiconductor courses at the University of Houston, Texas A&M University System, and PTI Seminars. He has designed, developed, implemented, and evaluated customized training courses for major U.S. semiconductor corporations. His Ph.D. dissertation was "The Role of Distance Education in Corporate Training in the United States Semiconductor Manufacturing Industry”. Dr Karonika is a well-respected industry instructor and has taught hundreds of short courses on Ion Implantation, CVD, Process Overview, and Metallization to engineers and operators worldwide at companies such as Intel, Motorola, Applied Materials, Texas Instruments, and numerous others.