Gas Delivery for Semiconductor Processing

This course provides a practical, immediately usable knowledge of the techniques and methods for gas delivery to semiconductor processes. Gas flow requirements and challenges are related to each of the major processes with emphasis on how to improve process control and avoid specific problems. An understanding of gas box design and operation complements a detailed review of the valve, filter, flow controller and pressure transducer technologies. Through hands-on activities, this course will develop the attendee’s skill set to effectively diagnose problems without opening gas lines—thereby avoiding costly downtime.