- Correctly apply Statistical Process Control, even in those situations unique to the microelectronics industry, where the application of statistical process control is not straight forward
- Distinguish those circumstances where statistical process control cannot be applied straight forwardly from those where it can
- Separate equipment issues from other process factors
- Control line widths, overlay, and defects
- Choose a proper sample size
- Address situations in which parameters distributions, such as overlay, are non-normal
- Apply process control methods to research and development, as well as manufacturing
- Identify process drift and to feedback corrections to the process
|