Fundamentals of Photolithography
This course is designed to provide a sound foundation in the fundamentals of photolithography used today in integrated circuit fabrication.
PTI offers a one day explanation of Photolithography to production and engineering personnel in the semiconductor industry. Topics include types of photoresists, photoresist application and issues, exposure fundamentals, light, optics, lenses, exposure methods, developing chemicals, and photo tools. This manual was written for the layperson. Color illustrations and "Plain English" explanations help the student understand the course material.
Currently Scheduled Open Course Dates:
October 23, 2008 ~ Dallas, TX
Register now for the next session!
WHAT THE COURSE COVERS: |
- Integrated Circuit Manufacturing Process
- Photoresist Application
- Types of Photoresist
- Exposure Fundamentals
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- Exposure Methods
- Light, Optics & Lenses
- Photolithography Equipment
- Develop Chemicals and Methods
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WHO SHOULD ATTEND? |
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- Process Operators
- R & M Technicians
- Process Technicians
- Equipment Engineers
- Human Resources
- Tool and Material Vendors
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- Sales and Marketing
- Quality
- Engineering
- Customer Service
- Other personnel who would like an
explanation of Photolithography
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This course includes an Photolithography Manual with color illustrations and handouts
for an Electromagnetic Spectrum Chart, and a Patterning Process Sheet.
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INSTRUCTOR: |
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Rex Collier earned a BS in Computer Science and a MS in Education. He has been teaching courses about Semiconductor Processing Overview,
Photolithography, and Basic Electronics for PTI Seminars and Texas A&M since 1988. Rex has taught courses all over the world for hundreds of semiconductor companies.
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