SEMI Standards - EDA Interface-A Standards Overview

This 1.5 day technical seminar covers the new suite of Equipment Data Acquisition (EDA) standards known as “Interface A.” These include Common Equipment Model (E120), Equipment Client Authentication and Authorization (E132), Equipment Self Description (E125), and Data Collection Management (E134). Specific bindings to SOAP/XML will be covered to show how the standards are mapped to an actual message set.

The seminar also features a demonstration of an implementation of the EDA standards to give attendees a feel for how the individual services can be used in typical manufacturing operational scenarios.

This and all other courses are offered as On Site Training


    MATERIAL COVERED
  • Learn the details of the Interface A standards technical aspects
  • Find out about example fab/equipment system configurations that show the standards support Equipment Engineering System (EES) application environment
  • Overview of the standards technical aspects
  • Overview of the background and motivation for the EDA standards
  • The relationship between the EDA standards and other current/emerging standards (E121, E128, E30, and others)
  • Summary of the performance expectations at the tool and fab levels
  • Example fab/equipment system configurations that show the standards support
  • Equipment Engineering System (EES) application environment
    COURSE OBJECTIVES
  • SEMI E120 - Common Equipment Model (CEM)
  • SEMI E125 - Equipment Self Description (ESD)
  • SEMI E132 - Equipment Client A&A (ECAA)
  • SEMI E134 - Data Collection Management (DCM)

WHO SHOULD ATTEND?
  • Software Engineers
  • Systems Engineers
  • Quality Assurance Engineers
  • Support Engineers
  • Customer Service Personnel
  • Equipment Suppliers will gain an understanding of the specific demands that will be placed on their equipment by Interface A in terms of message content, usage scenarios, and overall performance in an automated production context.
  • Semiconductor Manufacturers will learn how the capabilities of Interface A can provide detailed equipment and process data to the people and systems that need it, how to translate this into specific requirements for the equipment suppliers and what needs to be done on the fab side to validate and effectively deploy EDA standards.


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