Advanced Wet Etch and Cleaning

This course is designed to provide the student with methods that are used in advanced wet cleaning.

Currently Scheduled Open Course Dates:

December 11, 2008 ~ Dallas, TX

Register now for the next session!

We offer this and all courses as On Site Training

COURSE CONTENT:

  • Intro to Etching and Cleaning
  • Chemicals Used in Wet Cleaning
  • Standard Clean Process
  • Piranha, HF, SC1, Ozonated water systems
  • Wettability of Surfaces
  • Surfactants
  • Rinsing and Drying
  • Particulate Contamination
  • Megasonic Cleaning
  • Pourbaix Diagrams
  • BEOL Cleaning

WHO SHOULD ATTEND?

  • Process Engineers
  • Process Development Engineers
  • Product Engineers
  • Tool Vendors
  • Tool Sales and Marketing
  • Training
  • Researchers

INSTRUCTOR:

Srini Raghavan is a Professor of Materials Science and Engineering at the University of Arizona in Tucson. He obtained his Ph.D. in Materials Science and Mineral Engineering from the University of California at Berkeley in 1976 and is on the faculty of University of Arizona. He teaches classes in applied surface chemistry, corrosion and degradation of materials, and physical chemistry of materials. His research interests are in the areas of wet processing of silicon, micro-contamination, chemical mechanical polishing. He holds 3 patents and has published over 80 technical papers.

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