This introductory course is designed to educate people from any
background on the exciting new technologies and markets being developed
in MEMS. The course begins with basic fabrication technologies,
including traditional methods and the latest techniques. Next is an
explanation of the governing equations of these devices, where many
things are different from macro-scale electromechanical systems.
Fabrication and design are illustrated with examples of existing
and future products in inertial sensors, optical fiber switching,
displays, and sensor networks.
WHAT THE COURSE COVERS: |
|
|
|
WHO SHOULD ATTEND? |
|
|
|