PT International, LLCSemiconductor Training

Failure Analysis & Prevention of Semiconductor Tools Due to Corrosion (1 day)


When semiconductor tools fail it is important to determine the root cause of the problem.. A key source of particles is the result of corrosion processes in semiconductor equipment and gas delivery lines.
In particular halogens, chlorine, bromine and fluorine. These particles fall on the dies and become embedded in the developing structure. Corrosion issues can occur in semiconductor tools such as etch, deposition, CMP, loadlocks, ,robotics, transfer chambers, process chambers, gas panels, gas delivery lines and process cooling water systems.

Students will learn about various forms of corrosion and prevention such as:

  • General Corrosion
  • Pitting Corrosion
  • Stress Corrosion Cracking
  • Galvanic Corrosion
  • Intergranular Corrosion

What the Course Covers:

  1. ·Corrosion Testing
    Advanced Coating Evaluation: Immersion testing of advanced coatings in acid enviroments to determine coating integrity and resistance to corrosion.

    Vendor Quality Evaluation: Evaluation of tool vendors to determine quality of electro-polishing and passivation process.

    Students will learn:
    Stereoscopic Microscope Examination Techniques
    Dye Penetrant Testing
    Radiographic Examination Techniques
    Optical Microscopy
    Scanning Electron Microscopy and EDS Analysis
    Auger and XPS Surface Analysis
    ​Optical Emission Spectroscopy for Chemical Analysis

Who Should Attend:

Tool Designers, Equipment Engineers R&M ,technicians, and students who would like a detailed understanding of corrosion issues in semiconductor tools 

Next Schedule Date and Location:

Only offer at clients site

Price: $9,800 USD for up to 14 students