March 28-29, 2023/ Webinar for
Cost: $1795 USD
$17900 for up to 20 attendees for 2 days
Outline of Course
This course covers all F.A. & Reliability issues for semiconductor tools (Course can be offer over 2-3 days)
Setting Reliability Goals
Understanding the big picture, i.e., starting with factory goals. Use Reliability Apportionment to translate the goals down to equipment and sub-systems. Introduction of modeling techniques, e.g., simulation, Reliability Block Diagrams, total cost, what-if scenarios, etc. Benefits for the customer and supplier in adopting these more rigorous approaches.
Data Collection & Analysis
Data Collection and Analysis with a clear purpose – eliminating all limiters to performance, including failures, PMs, assists, etc. This is NOT done by determining MTBFs of failures. Instead, we look for failure modes which are often driven by different wear factors. The bottom line is that we collect the specific data that can drive actionable analysis and results. This is done through the use of the Weibull distribution, which has some special properties, e.g., we can identify the nature of failures and know the appropriate action to pursue. By understanding the probabilities of failure, we can get the information we need to optimize part replacement frequencies, PM frequencies, and more.
Science- Based Causal Analysis
Understand the shortcomings of using standard methods for serious problems. SBCA avoids brainstorming, guessing, and opinions to drive the analysis. Instead, it uses science and equations to drive each level of the diagram. This results in much better breadth and depth. When equations aren’t available, use available, reputable, and rigorous research. We also expand the areas of causes for consideration, including human beings that directly or indirectly influence the system, with psychology, sociology, social norms, cognitive bias, emotion, and motivation. The purpose is to identify and resolve contradictions, which may seem impossible, but are entirely possible.
Systematic Solution Generation
We use “separation strategies” from “TRIZ”, which enable the complete resolution of those contradictions. Those strategies have been proven countless times, as seen in the world’s patent databases. The entire TRIZ body of knowledge is huge and difficult to completely understand and use. But by just focusing on its “separation strategies”, we can still create numerous solution concepts which can meet our requirements of being, inexpensive, simple, and without compromises. This is definitely a new entry into any reliability engineering, and it not only greatly enhances the power of our efforts, but it also boosts the success and satisfaction of users.
Reliability Test Plans
We first cover the common testing techniques and plans, along with their pros and cons. These include “Reliability Qualification Tests”, “Sequential Probability Ratio Tests”, Growth Testing, and others. By utilizing the results of Weibull Analysis, the participants learn that their testing efforts can be much more practical and efficient while improving confidence. One such technique is called the “Weibull Zero-Failure Test”. Several methods for accelerating tests are also covered.
Advanced Reliability Practices for Improving Semiconductor Manufacturing Equipment Performance (2 Days)