This 1 day course is designed to provide a sound foundation in the fundamentals of chemical mechanical planarization (CMP) used today in integrated circuit fabrication. Topics include CMP overview, CMP tools, CMP consumables, fundamentals of process control, dielectric CMP, CMP of conducting materials and post CMP cleaning.
Who Should Attend:
Process engineers, R&M technicians, equipment engineers, product engineers
Next Schedule Date and Location:
Only offer at clients site
Price: $8,900 USD for up to 14 students