PTInternational LLCSemiconductor Training
a SEMI University Training Partner!

plasma etching, ALE and rie ( 1 day)


The  course discusses the fundamentals of plasma assisted phenomena and reactive ion etching (RIE) processes. The emphasis is on the physical and chemical processes that determine the consequences of a reactive gas plasma/surface interaction. The role of energetic ions as encountered in RIE systems is discussed in detail and the factors which influence anisotropy of etching are highlighted. Plasma-assisted etching equipment is described including capacitively coupled, inductively coupled and wave-generated plasmas sources.
The instructor discusses the applied aspects of plasma-assisted etching from a general point of view. The emphasis is on mechanistic understanding. The etching of Si and its compounds is covered in detail. The chemistries used in the etching of other technology-related materials such as Al, organics, and III-V compounds are summarized. Other topics presented include selectivity, loading, ARDE and feature scale problems, damage, and issues associated with high-density plasma RIE. A section on plasma diagnostics and ion-beam based etching methods is briefly discussed.

This course will enable you to:

         The Fundamentals]

  • know the basic concepts of plasma etching
  • Plasma Systems
  • understand the physics of rf glow discharges (both high and low density)
  • understand the surface science aspects of RIE including the role of energetic ions
  • recognize the factors which influence etching anisotropy
  • learn about plasma-surface chemistry leading to etching
  • [Applied Aspects]
  • recognize fluorocarbon plasma etching of Si and its compounds
  • understand selectivity, loading effects, and aspect ratio dependent etching
  • learn about uniformity of etching, damage, feature charging issues, and particles
  • understand etching of other materials (Al, organics, III-V compounds, etc)
  • learn about plasma diagnostics such as optical emission spectroscopy with actinometry, mass spectrometry and laser-induced fluorescence
  • discuss issues in high density plasma etching, wall effects, and ion beam-based methods.
  • Discuss Deep Reactive Ion Etching (DRIE)
  • Discuss applications and processing etching using ALE
  • Discuss end point detection


Who Should Attend:

This course is intended for scientists, technicians and others working with or interested in the dry etching of materials in reactive gas glow discharges, particularly those who do not have extensive experience in the field. The first day deals with basic concepts and can be taken separately if the attendee does not need the more practical issues covered during the second day.

Next Schedule Date and Location:

Price:  On site $10,900 USD for up to 14 students