RF Power Delivery in Linear Accelerator Systems – Two days

Target Audience – process and equipment engineers and equipment technicians

Prerequisite – Vacuum Technology for Semiconductor Processing or strong knowledge of vacuum systems

Class Size – up to 14 attendees

A variant of the RF Power Delivery in Plasma Systems class titled RF Power Delivery in Linear Accelerator Systems is available for equipment engineers and technicians who work closely with ion implanters rather than in systems focused on RF power delivery to plasma.

Class Goal – Understand the role of RF power delivery in linear accelerators to provide high voltage nodes used to accelerate ions to the required velocity through a multi-generator set along the beam line.