RF Power Delivery in Plasma Systems – Two days

Target Audience – process engineers and technicians, equipment engineers and technicians.

Prerequisite – Plasma Physics and Chemistry Course

Class Size – up to 14 attendees

Class Goal – To teach the audience how RF energy is used to create a plasma, how RF power is generated and transmitted through systems components and into the plasma chamber and how the energy is coupled to the plasma. Emphasis on how RF parameters can influence the plasma properties which determine process results, on proper grounding and shielding, and on how to troubleshoot common RF problems.

Class is two days of densely packed material with several short hands-on lab exercises and a two-hour lab session toward the end of the second day in which everyone is expected to actively participate. It involves taking measurements and running RF scenarios to demonstrate concepts taught and gets students comfortable with using and talking about RF power delivery and troubleshooting of RF issues.