Vacuum and RF Plasma Technology for Semiconductor Process Tools 1-3 days
The purpose of these courses is to:
• Establish a common vocabulary for precise communications
• Understand the vacuum systems in semiconductor process tools and importance of system elements to provide clean and precise vacuum environments for wafer processing
• Provide a basic understanding of gaseous plasma characteristics, important parameters, and applications
• Understand the RF parameters which influence plasma properties and determine process results
• Provide a fundamental understanding of the specifics of how to generate, distribute and couple RF energy to a low-pressure gas including measurements and calculations needed
• Provide hands-on training with appropriate instrumentation to characterize and understand the methods required to design, test, and troubleshoot vacuum plasma equipment
• Optionally: Provide a day to characterize or troubleshoot a specific new or troublesome tool inside of the wafer fab into practice many of the elements learned over the previous day’s courses
Multi-day class summaries for Technicians and Engineers
The goal of these classes is to bring the audience up to a level where they will have a good understanding of RF power delivery to a gaseous plasma. They will learn how to measure and troubleshoot many RF plasma process tool problems. Further, they will learn how to determine what testing routes might be the best ones to pursue in solving RF-related tool design and tool-down issues.
The students may start with either vacuum processing or they can start with plasma fundamentals, if they already have a very good knowledge of vacuum processing systems. Even seasoned veterans in the industry get a lot out of the vacuum processing course, so there is benefit there if time allows.
The end goal of these courses is also that the students can become fluent in discussing RF power delivery issues and be able to effectively present these findings to others who might be in a decision-making role to garner resources and drive actions.Type your paragraph here.