Vacuum Technology for Semiconductor Processing – One day

Target Audience – operators, process managers, engineers and technicians, plant managers and supply-chain managers that need a basic understanding and common vocabulary of Vacuum processing and the equipment and tools involved in it.

Prerequisite – None

Class Size – up to 24 attendees

Class Goal – To teach the audience why we process in vacuum, how we create and measure vacuum pressures, the mechanisms of heat transfer and wafer temperature control in vacuum, and best practices for working on vacuum tools. Emphasis is placed on understanding how vacuum levels and system cleanliness determine the outcomes of etch, CVD, and PVD processes.

Class is one day with mostly lecture and short demonstrations of vacuum pumping and pressure scenarios.