Advanced Reliability Practices for Improving Semiconductor Manufacturing Equipment Performance

Professional semiconductor training with 46+ years of industry expertise

Course Overview

This course covers all Failure Analysis & Reliability issues for semiconductor tools. The course can be offered over 2-3 days and provides comprehensive coverage of reliability engineering principles specifically applied to semiconductor manufacturing equipment.

Course Content

Setting Reliability Goals

Understanding the big picture, starting with factory goals. Use Reliability Apportionment to translate the goals down to equipment and sub-systems. Introduction of modeling techniques, e.g., simulation, Reliability Block Diagrams, total cost, what-if scenarios, etc. Benefits for the customer and supplier in adopting these more rigorous approaches.

Data Collection & Analysis

Data Collection and Analysis with a clear purpose – eliminating all limiters to performance, including failures, PMs, assists, etc. This is NOT done by determining MTBFs of failures. Instead, we look for failure modes which are often driven by different wear factors. The bottom line is that we collect the specific data that can drive actionable analysis and results. This is done through the use of the Weibull distribution, which has some special properties.

Science-Based Causal Analysis

Understand the shortcomings of using standard methods for serious problems. SBCA avoids brainstorming, guessing, and opinions to drive the analysis. Instead, it uses science and equations to drive each level of the diagram. This results in much better breadth and depth. When equations aren't available, use available, reputable, and rigorous research.

Systematic Solution Generation

We use "separation strategies" from "TRIZ", which enable the complete resolution of contradictions. Those strategies have been proven countless times, as seen in the world's patent databases. By focusing on TRIZ "separation strategies", we can create numerous solution concepts which can meet our requirements of being inexpensive, simple, and without compromises.

Reliability Test Plans

We first cover the common testing techniques and plans, along with their pros and cons. These include "Reliability Qualification Tests", "Sequential Probability Ratio Tests", Growth Testing, and others. By utilizing the results of Weibull Analysis, participants learn that their testing efforts can be much more practical and efficient while improving confidence.

Who Should Attend

Reliability engineers, equipment engineers, manufacturing professionals, and anyone involved in semiconductor tool reliability and failure analysis.

Prerequisites

Basic understanding of semiconductor manufacturing equipment and reliability concepts is recommended.

Ready to Register?

$1,795 USD per person
(2-day course)
$17,900 USD for up to 20 students
(On-site training - 2 days)
Register Now
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Duration
2 Days
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Format
On-site Training

Need More Information?

Have questions about this course or need a custom training solution?

Phone: 636-343-1333

Email: heather@pti-inc.com