PTI technical training
Semiconductor Metrology & Defect Inspection
Explore semiconductor metrology and defect inspection methods. Review PTI's course outline and discuss technical training for your engineering team.
Course Overview
This course provides a deep dive into semiconductor metrology and defect inspection techniques. Participants will learn how to measure, monitor, and control critical dimensions, overlay, and defect densities to ensure high-quality device fabrication. Hands-on examples and case studies illustrate best practices in modern fabs.
Learning Objectives
- Understand key metrology tools: CD-SEM, scatterometry, AFM, overlay, and defect inspection systems
- Learn how to analyze measurement data and correlate with process performance
- Apply inline and offline inspection strategies to improve yield
- Identify common defect sources and methods to mitigate them
- Evaluate and select appropriate metrology techniques for specific process steps
Who Should Attend
Metrology engineers, process engineers, yield engineers, QA/QC specialists, and production supervisors involved in inline and offline inspection.
Prerequisites
Basic knowledge of semiconductor fabrication processes is recommended.