Semiconductor Metrology & Defect Inspection

Professional semiconductor training with 46+ years of industry expertise

Course Overview

This course provides a deep dive into semiconductor metrology and defect inspection techniques. Participants will learn how to measure, monitor, and control critical dimensions, overlay, and defect densities to ensure high-quality device fabrication. Hands-on examples and case studies illustrate best practices in modern fabs.

Learning Objectives

  • Understand key metrology tools: CD-SEM, scatterometry, AFM, overlay, and defect inspection systems
  • Learn how to analyze measurement data and correlate with process performance
  • Apply inline and offline inspection strategies to improve yield
  • Identify common defect sources and methods to mitigate them
  • Evaluate and select appropriate metrology techniques for specific process steps

Who Should Attend

Metrology engineers, process engineers, yield engineers, QA/QC specialists, and production supervisors involved in inline and offline inspection.

Prerequisites

Basic knowledge of semiconductor fabrication processes is recommended.

Ready to Register?

$3,200 USD per person
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Duration
2 Days
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Format
On-site Training

Need More Information?

Have questions about this course or need a custom training solution?

Phone: 636-343-1333

Email: heather@pti-inc.com