PTI technical training

Fundamentals of ALD, ALE and Precursor Chemistries

Study ALD, precursor chemistries, area-selective deposition and atomic layer etching. Explore PTI's one-day course and ask about training availability.

Course Overview

Discover how atomic-scale precision is revolutionizing semiconductor manufacturing with Atomic Layer Deposition (ALD) and Etching (ALE). This course provides a practical introduction to Atomic Layer Deposition, an essential technique in semiconductor manufacturing.

You'll learn about ALD foundational concepts including growth, advantages, measurements, and more, chemical precursors for use in ALD, selected ALD processes, area-selective deposition, and atomic layer etching. Overall, the applications and chemistry used in semiconductor processing as it relates to ALD and ALE are heavily discussed.

Learning Objectives

  • Understand foundational concepts of ALD
  • Describe chemical precursors for use in ALD
  • Identify selected ALD processes and their associated films and materials
  • Explain area-selective deposition (ASD) and its uses
  • Describe Atomic Layer Etching (ALE) concepts and understand its relationship to ALD

Course Topics

ALD Foundational Concepts

  • ALD growth mechanisms and principles
  • Advantages of atomic layer deposition
  • Measurement techniques and characterization
  • Process parameters and control

Chemical Precursors and Processes

  • Chemical precursors for ALD applications
  • Selected ALD processes and materials
  • Film properties and characteristics
  • Process optimization strategies

Advanced ALD Techniques

  • Area-selective deposition (ASD) concepts and applications
  • Atomic Layer Etching (ALE) fundamentals
  • Relationship between ALD and ALE
  • Applications in semiconductor processing

Who Should Attend

Professionals in the semiconductor industry who want to understand ALD technology and chemistry used in ALD and ALE. This course may especially benefit those who are directly working with precursor gases used in ALD and ALE processing, including gas and equipment providers.

Prerequisites

Basic understanding of semiconductor manufacturing processes and thin film deposition techniques is recommended.