PTI technical training
Mass Flow Controllers (MFC)
Explore mass flow controllers used in semiconductor equipment and processing. Review PTI's MFC course topics and discuss training for your organization.
Course Overview
This 1-day course is designed for equipment and process engineers and technicians engaged in the running of equipment which requires precise gas flows. Students will understand the inner workings of mass flow controllers and their criticalities. Learn best practices in the use and maintenance/installation of these devices to keep them at peak performance and accuracy.
Course Goals
- Understand the inner workings of mass flow controllers and their criticalities
- Learn best practices in the use and maintenance/installation of these devices
- Keep MFCs at peak performance and accuracy
- Troubleshoot common MFC issues
- Optimize gas delivery systems
Course Topics
MFC Fundamentals
- Mass flow controller principles of operation
- Types of mass flow controllers
- Thermal vs. pressure-based flow measurement
- Flow sensor technologies
- Control valve mechanisms
Gas Flow Control Systems
- Process gas delivery systems
- Gas panel design and layout
- Flow control accuracy and repeatability
- Gas mixing and blending applications
- System integration considerations
Installation and Setup
- Proper MFC installation procedures
- Plumbing and connection best practices
- Electrical connections and grounding
- Initial setup and configuration
- System leak testing and verification
Calibration and Maintenance
- MFC calibration procedures
- Gas conversion factors
- Calibration standards and traceability
- Preventive maintenance schedules
- Performance verification methods
Troubleshooting and Optimization
- Common MFC failure modes
- Diagnostic techniques and tools
- Performance troubleshooting
- System optimization strategies
- When to repair vs. replace
Best Practices and Safety
- MFC handling and storage
- Safety considerations for process gases
- Documentation and record keeping
- Quality control procedures
- Industry standards and compliance
Target Audience
Equipment and process engineers and technicians engaged in the running of equipment which requires precise gas flows.
Prerequisites
None - this course is designed for all experience levels.