Definition
A four-contact electrical measurement in which current is forced through two probes and voltage is sensed with two separate probes, minimizing lead/contact resistance error when determining sheet resistance.
Application
Used for rapid wafer mapping of sheet resistance in implanted/diffused layers, conductive films, and process-monitor wafers.
Related search terms
Four-Point Probe
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Related concepts
Evidence and further reading
- Evidence from tek.comhttps://www.tek.com/en/documents/application-note/materials-char_apps_guide
- Evidence from tek.comhttps://www.tek.com/en/blog/four-wire-resistivity-measurements