Definition
An electrical property describing lateral resistance in a thin conducting or semiconducting layer, expressed in ohms per square.
Application
Used to characterize conductive films and doped semiconductor layers, including monitoring metal-film uniformity and ion-implant processes.
Related concepts
Evidence and further reading
- Evidence from ossila.comhttps://www.ossila.com/pages/sheet-resistance-theory
- Evidence from kla.comhttps://www.kla.com/wp-content/uploads/R50-1.pdf