EUV Technology

Professional semiconductor training with 46+ years of industry expertise

Course Overview

This course provides attendees with a full overview of the fundamentals, current status, and technical challenges of EUV Lithography. Topics covered include EUV Sources, EUV Source Metrology, EUV Optics, EUV systems and patterning, and EUV Mask.

What the Course Covers

  • History and basics of the development of EUV Lithography
  • Different EUV source types and current technical challenges
  • EUV source metrology and source power measurements
  • EUV multilayer optics
  • EUV systems and patterning
  • Key components in EUV systems and current technical challenges
  • EUV mask technology and current technical challenges
  • Status and technical challenges of EUV Lithography for high volume manufacturing
  • Commercial aspects of EUVL

Who Should Attend

Anyone involved in EUV Lithography development, emerging lithography techniques, or making technology decisions for advanced semiconductor manufacturing (14 nm node and beyond).

Ready to Register?

In person $995 / Webinar $845

Group onsite $9900 for up to 20 students (1 Day)

Register Now
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Duration
1 Day
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Format
On-site Training

Need More Information?

Phone: 636-343-1333

Email: heather@pti-inc.com