Definition
The amount of net electric charge contained per unit volume, or per unit area when a surface density is specified. In a plasma, local imbalance between positive and negative charged species creates nonzero space-charge density.
Application
Used in plasma-process modeling to determine electric fields, sheath behavior and particle motion near wafer and chamber surfaces, where charge separation can strongly affect ion trajectories and charging damage.
Related search terms
Space-charge density; net charge density (plasma context)
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/plasma-charge-density-ratios-dusty-plasma-0
- Evidence from ideals.illinois.eduhttps://www.ideals.illinois.edu/items/24868