Definition
A plasma is a fully or partially ionized gas containing charged particles; partially ionized plasmas also contain neutral species, and semiconductor process plasmas can contain reactive radicals and excited species.
Application
Used to drive dry etch, deposition, cleaning, ashing, doping, and surface-modification processes by controlling reactive species and ion bombardment at wafer surfaces.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/image/plasmareferencecellhelpsbuildbetterchipsjpg
- Evidence from plasma.oxinst.comhttps://plasma.oxinst.com/products/icp-etching/