Definition
The gate voltage of a MOS structure at which semiconductor band bending is removed so the semiconductor energy bands are flat; its value reflects work-function difference and fixed/interface charge.
Application
Used in MOS capacitor C–V analysis to extract oxide/interface charge and evaluate gate-stack process quality.
Related search terms
Flat Band Voltage; VFB
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Related concepts
Evidence and further reading
- Evidence from patents.justia.comhttps://patents.justia.com/patent/20170160335
- Evidence from researchconnect.buffalo.eduhttps://researchconnect.buffalo.edu/en/publications/low-temperature-pecvd-siosub2sub-on-si-and-sic/