Definition
The chemical purity of a process gas, specified by its desired-gas fraction or limits on chemical impurities such as moisture, oxygen and hydrocarbons. Particle cleanliness is characterized separately by particle number concentration at specified particle sizes.
Application
Controlled because trace contaminants can alter film composition, plasma behavior, interface quality, defectivity, and yield in sensitive semiconductor processes.
Related search terms
Gas Purity
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Evidence and further reading
- Evidence from linde-gas.comhttps://www.linde-gas.com/products-and-services/gases/electronic-gases
- Evidence from airproducts.comhttps://www.airproducts.com/gases/electronics