Definition
The facility and tool-side hardware that stores, regulates, purges, meters, distributes, and delivers process gases at specified pressure, flow, purity, and safety conditions.
Application
Used to supply repeatable gas chemistry to deposition, etch, implant, thermal, and other semiconductor equipment while maintaining containment and purity.
Related search terms
Gas Delivery System; GDS
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Related concepts
Evidence and further reading
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/By-Industry/Microelectronics/Semiconductor/Deposition/Gas-Delivery-Cabinet-Systems/c/industries-microelectronics-semiconductor-deposition-gasdeliverycabinetsystems
- Evidence from mks.comhttps://www.mks.com/mam/celum/celum_assets/resources/MKSProductOverview-DS.pdf