Definition
Device that measures and regulates gas mass flow to a commanded setpoint for controlled process-gas delivery.
Application
Used in semiconductor etch, deposition, and other vacuum processes to deliver reproducible precursor and reactant gas flows.
Related search terms
gas mass flow controller
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Related concepts
Evidence and further reading
- Evidence from brooksinstrument.comhttps://www.brooksinstrument.com/company/news/brooks-instrument-introduces-pressure-based-mass-flow-controller-for-semiconductor-manufacturing
- Evidence from brooksinstrument.comhttps://www.brooksinstrument.com/product/gp200-series