Definition
The quantity of process gas passing a defined point per unit time, commonly specified as standard-volume flow such as sccm or slm for semiconductor tools.
Application
Controlled by mass-flow devices to set reactant ratios, residence time, plasma chemistry, deposition/etch rate, and process repeatability.
Related search terms
Gas Flow Rate
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Related concepts
Evidence and further reading
- Evidence from mks.comhttps://www.mks.com/c/mass-flow-controllers
- Evidence from brooksinstrument.comhttps://www.brooksinstrument.com/en/products/mass-flow-controllers