Cleanroom, Vacuum, Gases & Facilities
Browse 54 glossary entries in Cleanroom, Vacuum, Gases & Facilities. Open a term for its definition, application, related concepts and evidence.
54 entries
- Chamber Pressure
- Chemical Filter
- Clean Dry Air
- Cleanroom
- Cleanroom Classification
- Cleanroom Garment
- Contamination
- Contamination Control
- Cross Contamination
- Deionized Water
- Electrostatic Discharge
- Etch Chamber
- FOUP Load Port
- Front Opening Unified Pod
- Gas Cabinet
- Gas Delivery System
- Gas Flow Rate
- Gas Monitoring System
- Gas Purity
- Gowning Protocol
- Grounding
- Helium Leak Detection
- High Vacuum
- ISO Cleanroom
- Leak Detection
- Leak Rate
- Load Lock
- Mass Flow Controller
- Mini-Environment
- Molecular Flow
- Nitrogen
- Nitrogen Purge
- Organic Contamination
- Partial Pressure
- Particle
- Particle Adders
- Particle Counter
- Passivation
- Point-of-Use Filter
- Preclean
- Pressure Transducer
- Process Chamber
- Pump Speed
- Residual Gas Analyzer
- SMIF
- Solvent Exhaust
- ULPA Filter
- Ultra-Pure Water
- Vacuum
- Vacuum Gauge
- Vacuum Pump
- Vacuum Transfer Module
- Valve Manifold Box
- Wafer Carrier
Continue learning with PTI
Related PTI training covers the following parts of this topic. See each course outline for its scope.
- Vacuum Systems Operation and Diagnostics
Vacuum pumps, pressure gauges, residual gas analysis and gas delivery.
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.