Nitrogen

03 Cleanroom, Vacuum, Gases & Facilities

Notation N2

Definition

Nitrogen is the chemical element N; molecular nitrogen used as a process gas is N2, a diatomic gas that is comparatively inert under many ordinary conditions.

Application

Ultra-high-purity nitrogen is supplied at fab scale for semiconductor manufacturing and is widely used as a clean bulk utility/process gas; specific uses depend on the tool and process.

Related search terms

nitrogen gas; molecular nitrogen

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Related concepts

Evidence and further reading