Definition
Use of dry, high-purity nitrogen to displace or control the atmosphere inside an enclosure, carrier, line, or process volume.
Application
In semiconductor wafer handling, nitrogen purging is used in purge-compatible carriers such as FOUPs to reduce wafer exposure to humidity, oxygen, particles, and airborne molecular contaminants.
Related search terms
nitrogen inerting
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Related concepts
Evidence and further reading
- Evidence from entegris.comhttps://www.entegris.com/en/home/about-us/events/asmc.html
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/products/wafer-handling/wafer-processing/200-mm-wafer-processing/A200-Wafer-SMIF-Pods/p/A200WaferSMIFPods?variant=9700-5330-01