Definition
The standardized equipment interface that receives a 300 mm FOUP, docks and opens its door, and enables wafer transfer between the carrier and the tool's internal handling environment.
Application
Used at automated 300 mm process and metrology tools to maintain controlled wafer handling while interfacing factory transport with equipment front-end modules.
Related search terms
FOUP Load Port
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from product.tdk.comhttps://product.tdk.com/system/files/dam/doc/product/fa/fa/foup/catalog/fa_foup_tas300-j1_en.pdf
- Evidence from rorze.comhttps://www.rorze.com/en/wp-content/uploads/sites/2/2025/11/IntegratedReport_RORZE_en_2025.pdf