Definition
The coordinated methods used to prevent, detect, contain and remove contamination from semiconductor wafers, process chemicals, gases, equipment, carriers and cleanroom environments.
Application
Used to protect yield and process stability through cleanroom practices, filtration and purification, materials control, equipment cleaning, carrier management, monitoring and root-cause analysis of contamination sources.
Related search terms
Fab contamination control; contamination management
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/virtual-asmc-2020-tutorial
- Evidence from entegris.comhttps://www.entegris.com/en/home/our-science/by-solution-area/contamination-control.html