Definition
A point-of-use filter is a filter installed close to the final dispense or process-use point to remove particles or other targeted contaminants immediately before a process fluid reaches the wafer or tool.
Application
Used in semiconductor chemical, solvent, photochemical, and ultrapure-water delivery to reduce particles at the final point of use and protect contamination-sensitive processes.
Related search terms
Point-of-use filtration; POU filtration
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Related concepts
Evidence and further reading
- Evidence from shop.pall.comhttps://shop.pall.com/us/en/microelectronics/semiconductor/chemicals/zidgri78le5
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/products/liquid-filtration-and-purification/liquid-filters/Optimizer-ST-Filter/p/OptimizerSTFilter