Definition
A room in which airborne-particle concentration is controlled and classified and which is designed, constructed and operated to limit the introduction, generation and retention of contaminants.
Application
Used for semiconductor wafer fabrication and other contamination-sensitive manufacturing, with airflow, filtration, pressure, temperature, humidity, materials and operating practices controlled to protect process yield and product integrity.
Related search terms
Clean room; controlled clean environment
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Related concepts
Evidence and further reading
- Evidence from iso.orghttps://www.iso.org/obp/ui?_escaped_fragment_=iso%3Astd%3Aiso%3A14644%3A-14%3Aed-2%3Av1%3Aen
- Evidence from iso.orghttps://www.iso.org/standard/72379.html