Definition
An ultra-low penetration air filter; in EN 1822 terminology, ULPA filters occupy classes U15–U17, classified by particle-removal efficiency at the most penetrating particle size.
Application
Filters supply air in semiconductor and other microelectronics cleanrooms to limit particle contamination.
Related search terms
Ultra-Low Penetration Air Filter
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Related concepts
Evidence and further reading
- Evidence from camfil.comhttps://www.camfil.com/sv-se/kunskapscenter/utbildning-och-expertis/epa-hepa-ulpa-filter-vilket-behover-du
- Evidence from aafintl.comhttps://www.aafintl.com/us/products/high-purity-%28hepa%29-equipment/terminal-supply-units/astrohood--s-iii