Definition
The designation of cleanroom air cleanliness according to measured concentrations of airborne particles at specified particle-size thresholds and sampling locations.
Application
Used to specify, verify and monitor whether a semiconductor cleanroom or clean zone meets the airborne-particle limits required for its process, equipment and product sensitivity.
Related search terms
Air cleanliness classification; ISO cleanroom class
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Related concepts
Evidence and further reading
- Evidence from iso.orghttps://www.iso.org/standard/53394.html
- Evidence from iso.orghttps://www.iso.org/standard/60598.html