Definition
An ISO cleanroom is a controlled environment whose airborne particulate cleanliness is classified according to ISO 14644 particle-concentration limits.
Application
Used in semiconductor fabrication to control airborne contamination at cleanliness levels appropriate to lithography, deposition, etch, metrology, and other contamination-sensitive processes.
Related search terms
ISO-classified cleanroom
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Related concepts
Evidence and further reading
- Evidence from iso.orghttps://www.iso.org/standard/53394.html
- Evidence from iso.orghttps://www.iso.org/standard/72379.html