Definition
A particle is a discrete contaminant, solid or liquid, whose presence on or near semiconductor wafers can interfere with fabrication and create defects.
Application
Monitored and controlled in cleanrooms, process tools, wafer handling, and process fluids because particle contamination can disrupt patterning or films and reduce yield.
Related concepts
Evidence and further reading
- Evidence from appliedphysicsusa.comhttps://appliedphysicsusa.com/particle-contamination-on-silicon-wafers-and-film-deposited-wafers-what-ic-fabs-must-know/
- Evidence from tsi.comhttps://tsi.com/electronics-manufacturing/products/cleanroom-particle-counters