Definition
Particle adders are particles newly introduced to a wafer by a process, tool, maintenance, or handling step relative to its incoming particle condition.
Application
Used as a contamination and equipment-qualification metric to determine whether a process step or tool adds particles that can become wafer defects.
Related concepts
Evidence and further reading
- Evidence from patents.justia.comhttps://patents.justia.com/patent/20250323028
- Evidence from foamtecintlwcc.comhttps://www.foamtecintlwcc.com/industries-served/semiconductor-manufacturing/