Definition
A particle counter is an instrument that detects and counts particles in a sampled volume and may classify them by size.
Application
Used for semiconductor cleanroom classification, process-tool and environment monitoring, filter testing, and contamination-source investigation.
Related concepts
Evidence and further reading
- Evidence from tsi.comhttps://tsi.com/electronics-manufacturing/products/portable-particle-counters/aerotrak-portable-particle-counter-9110
- Evidence from tsi.comhttps://tsi.com/electronics-manufacturing/products/cleanroom-particle-counters