Definition
High vacuum is the vacuum regime conventionally spanning approximately 10^-3 to 10^-7 mbar.
Application
Semiconductor etch, CVD, and other low-pressure processes use high-vacuum pumping to reduce background gas and establish controlled process conditions; high vacuum is distinct from ultra-high vacuum.
Related search terms
high vacuum range
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Related concepts
Evidence and further reading
- Evidence from leybold.comhttps://www.leybold.com/en-us/knowledge/vacuum-fundamentals/fundamental-physics-of-vacuum/units-and-ranges-of-pressure
- Evidence from edwardsvacuum.comhttps://www.edwardsvacuum.com/en-us/semiconductor/our-products/on-chamber-solutions/turbomolecular-pumps