Definition
A device that produces or maintains a vacuum by transferring gas away from a system or capturing gas within the pumping system.
Application
Evacuates semiconductor process chambers; suitable dry pumps remove process gases during deposition and etching.
Related concepts
Evidence and further reading
- Evidence from pfeiffervacuum.comhttps://www.pfeiffervacuum.com/no/en/knowledge/vacuum-technology/knowledge-book/4-vacuum-generation/
- Evidence from edwardsvacuum.comhttps://www.edwardsvacuum.com/en-us/semiconductor/our-products/ganymede
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.