Definition
In vacuum technology, a rarefied-gas state or environment with gas pressure or molecular density below the prevailing atmospheric level.
Application
Provides controlled environments for semiconductor thin-film deposition and etching.
Related concepts
Evidence and further reading
- Evidence from iso.orghttps://www.iso.org/obp/ui?_escaped_fragment_=iso:std:iso:3529:-1:ed-2:v1:en
- Evidence from api.p1.mks.comhttps://api.p1.mks.com/mam/celum/celum_assets/mks/resources/PrinciplesOfVacuum-TechNote.pdf
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.