Definition
An instrument for measuring gas or vapor pressure below the prevailing atmospheric pressure, either directly or through a pressure-dependent physical property.
Application
Measures vacuum process pressure in semiconductor tools, including metal-etch and nitride chemical-vapor-deposition equipment.
Related concepts
Evidence and further reading
- Evidence from iso.orghttps://www.iso.org/obp/ui?_escaped_fragment_=iso:std:iso:3567:ed-2:v1:en
- Evidence from mks.comhttps://www.mks.com/mam/celum/celum_assets/resources/DA03A-DS.pdf