Definition
A wafer-handling subsystem that provides a vacuum environment for transferring wafers between load locks and connected process chambers.
Application
Enables wafer movement among sputter, etch and other process modules in semiconductor cluster tools.
Related concepts
Evidence and further reading
- Evidence from fortrend.comhttps://www.fortrend.com/technical-blog/efem-load-lock-and-vtm-understanding-the-complete-architecture.html
- Evidence from kdf.comhttps://www.kdf.com/products/in-line-products-kdf-technologies/ci-cluster-tool/