Definition
Intermediate chamber that cycles between atmospheric pressure and process vacuum so wafers can enter or leave vacuum equipment without venting the main process chamber.
Application
Used in cluster tools to preserve process-chamber vacuum and cleanliness while transferring wafers between atmospheric handling and vacuum modules.
Related search terms
vacuum load lock
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Related concepts
Evidence and further reading
- Evidence from vatgroup.comhttps://www.vatgroup.com/series/970-load-lock
- Evidence from fortrend.comhttps://www.fortrend.com/technical-blog/efem-load-lock-and-vtm-understanding-the-complete-architecture.html